This platform gives TSMC the opportunity to take the next step forward in exploring multiple e-beam technology as a lithography option at 22 nanometer and more advanced process nodes. Multiple e-beam ...
and Hybrid Machine Learning" has been selected as the winner of the Vladimir Ukraintsev Award for "Collaborations in Metrology" at SPIE's 2024 Advanced Lithography + Patterning Conference.
This paper utilizes a compound optimization algorithm to design a super high frequency quartz resonator with a center frequency of 4.15GHz and successfully fabricates the device using electron beam ...
Quantum Innovation Centre (Q. InC), Agency for Science Technology and Research (A*STAR), 2 Fusionopolis Way, Innovis #08-03, Singapore 138634, Republic of Singapore Institute of Materials Research and ...
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