This specific wavelength is a key tool in photolithography ... This innovative laser system not only enhances the efficiency ...
Researchers at the Chinese Academy of Sciences (CAS) have developed a solid-state deep ultraviolet (DUV) laser that emits 193nm light in lab conditions—a wavelength critical for semiconductor ...
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Chinese scientists create 'breakthrough' solid-state DUV laser light source for chipmaking toolsThe Chinese Academy of Sciences has developed a light source that produces 193-nm DUV light, but it is years away from ...
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