Semiconductor Engineering19h
Many Options For EUV Photoresists, No Clear Winner
Individual EUV photons have a lot of energy, but there aren’t very many of them. Feature roughness depends on the interaction ...
C&EN5d
Polymer–Nanoparticle Composite Films with Ultrahigh Nanoparticle Loadings Using Capillarity-Based Techniques
Department of Chemical and Biomolecular Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States ...