Extreme ultraviolet (EUV) lithography is at the center of next-generation semiconductor manufacturing as it enables smaller ...

High-NA EUV makes progress toward high-volume manufacturing while optical lithography sees continued advances.

with a resolution down to several tens of nanometres. An extension of this technology could be an alternative option for next-generation, sub-13.5-nm lithography. Many of the technical issues ...

Soft lithography and 3D printing are two nanofabrication techniques, each offering advantages for microfluidics and ...

soft lithography employs elastomeric materials, typically polydimethylsiloxane (PDMS), to create patterns and structures with high fidelity and resolution. This versatile technique enables the ...

low resolution, high energy consumption, low light efficiency, and insufficient optical power density. To overcome these challenges, the research team built a maskless lithography prototype ...

As technological advancements persist in pushing the boundaries of performance and efficiency, the integration of EUV lithography has become increasingly imperative in achieving the finer resolution ...