One of the most complex parts of this process is lithography: the step in which shapes are drawn onto a silicon wafer. There are several ways to do this, all of them rather complicated ...

Nova (Nasdaq: NVMI) today announced that its co-authored paper with Samsung Electronics on "On-Cell Thickness Monitoring of Chalcogenide Alloy Layer using Spectral Interferometry, Raman Spectroscopy, ...

CDU is a major contributor to yield drop out in deep sub micron technologies and a big concern to the lithography process ... Mapper which provides wafer CD feedbacks to the scanner. This paper ...

This platform gives TSMC the opportunity to take the next step forward in exploring multiple e-beam technology as a lithography option at 22 nanometer and more advanced process nodes. Multiple e-beam ...

This process is known as lithography, from the Greek 'lithos' meaning stone, and 'grapho' meaning to write; literally 'to write on stone' where the 'stone' is a large, flat silicon crystal.

The paper demonstrates the application of Nova's novel technologies in advanced process control by utilizing its unique and differentiated solutions. The thickness of the chalcogenide Ovonic ...