One of the most complex parts of this process is lithography: the step in which shapes are drawn onto a silicon wafer. There are several ways to do this, all of them rather complicated ...

Today the state-of-the-art is a 1.35-NA immersion scanner ... the industry is now working on variants of the described litho–etch–litho–etch process, where etching is only performed once ...

Sequential stages of the Nanostencil Lithography process: (1) A stencil mask with nanoscale apertures is aligned over the substrate. (2) Material particles are deposited onto the substrate through the ...

Schematic image of the basic steps for creating ordered silicon nanostructures through a mask of polystyrene nanospheres using the nanosphere lithography process ...