A new solid-state laser produces 193-nm light for precision chipmaking and even creates vortex beams with orbital angular ...
Researchers at the Chinese Academy of Sciences (CAS) have developed a solid-state deep ultraviolet (DUV) laser that emits 193nm light in lab conditions—a wavelength critical for semiconductor ...
A new solid-state laser developed could transform semiconductor chip manufacturing, providing an alternative to gas-based ...
The Chinese Academy of Sciences has developed a light source that produces 193-nm DUV light, but it is years away from ...