Extreme ultraviolet (EUV) lithography is the next step in this trend. It uses radiation of wavelength 13.5 nm, thereby offering significant potential to extend the resolution of photolithography ...

with a resolution down to several tens of nanometres. An extension of this technology could be an alternative option for next-generation, sub-13.5-nm lithography. Many of the technical issues ...

Soft lithography and 3D printing are two nanofabrication techniques, each offering advantages for microfluidics and ...

Computational lithography uses various techniques of resolution enhancement technology (RET) to create more perfect images on the chip as the elements of the transistor get smaller and smaller.

soft lithography employs elastomeric materials, typically polydimethylsiloxane (PDMS), to create patterns and structures with high fidelity and resolution. This versatile technique enables the ...

low resolution, high energy consumption, low light efficiency, and insufficient optical power density. To overcome these challenges, the research team built a maskless lithography prototype ...

As technological advancements persist in pushing the boundaries of performance and efficiency, the integration of EUV ...